Unit 1 A Brief Introduce to Microelectronic Technology 1
　1.1 History About Microelectronics 1
　　Text 1
　　Technical words and Phrases 2
　　Notes to the text 3
　　Exercises 3
　1.2 Introduction To Some Courses 5
　　Text 5
　　Technical words and Phrases 6
　　Notes to the text 7
　　Exercises 7
　1.3 Reading Materials 8
　1.4 Unit Exercises 10
Unit 2 Semiconductor Device 18
　2.1 Semiconductor Diode 18

Unit 1 A Brief Introduce to Microelectronic Technology 1
　1.1 History About Microelectronics 1
　　Text 1
　　Technical words and Phrases 2
　　Notes to the text 3
　　Exercises 3
　1.2 Introduction To Some Courses 5
　　Text 5
　　Technical words and Phrases 6
　　Notes to the text 7
　　Exercises 7
　1.3 Reading Materials 8
　1.4 Unit Exercises 10
Unit 2 Semiconductor Device 18
　2.1 Semiconductor Diode 18
　　Text 18
　　Technical words and Phrases 22
　　Notes to the text 23
　　Exercises 23
　2.2 Transistors 24
　　Text 25
　　Technical words and phrases 27
　　Notes to the text 28
　　Exercises 28
　2.3 Microwave and Photonic devices 30
　　Text 30
　　Technical words and Phrases 34
　　Notes to the text 35
　　Exercises 35
　2.4 Reading Materials 37
　2.5 Unit Exercises 39
Unit 3 Micro-electronic Technology 43
　3.1 Crystal Growth 43
　　Text 43
　　Technical words and Phrases 44
　　Notes to the text 45
　　Exercises 45
　3.2 Film Growth 46
　　Text 46
　　Technical words and Phrases 47
　　Exercises 48
　3.3 Photolithography 48
　　Text 49
　　Technical words and Phrases 50
　　Exercises 50
　3.4 Oxide Growth 51
　　Text 51
　　Technical words and Phrases 53
　　Exercises 53
　3.5 Diffusion and Ion Implantation 54
　　Text 54
　　Technical words and Phrases 56
　　Notes to the text 57
　　Exercises 57
　3.6 Etching 58
　　Text 58
　　Technical words and Phrases 60
　　Notes to the text 60
　　Exercises 61
　3.7 Reading Material 61
　3.8 Unit Exercises 64
Unit 4 Integrated Circuits 67
　4.1 Introduction of Integrated Circuits 67
　　Text 67
　　Technical words and Phrases 71
　　Notes to the text 72
　　Exercises 72
　4.2 Integrated circuit design and verification 74
　　Text 74
　　Technical words and Phrases 79
　　Notes to the text 80
　　Exercises 80
　4.3 Introduction of Cadence Tools 81
　　Text 81
　　Technical words and Phrases 94
　　Notes to the text 95
　　Exercises 95
　4.4 Reading Materials 96
　4.5 Unit Exercises 99
Unit 5 Microelectronic Mechanical Systems (MEMS) 104
　5.1 Introduction to MEMS 104
　　Text 104
　　Technical words and Phrases 106
　　Notes to the text 107
　　Exercises 107
　5.2 Materials for MEMS 108
　　Text 108
　　Technical words and Phrases 111
　　Notes to the text 111
　　Exercises 111
　5.3 Processes for Micromachining 113
　　Text 113
　　Technical words and Phrases 116
　　Notes to the text 116
　　Exercises 116
　5.4 Reading Materials 118
　5.5 Unit Exercises 119
Unit 6 Scientific and Technological Papers 123
　6.1 Film Thickness Tester 123
　　Text 123
　　Technical words and Phrases 128
　　Notes to the text 129
　　Exercises 129
　6.2 WL13A0G10 Test System Option Manual 130
　　Text 130
　　Technical words and Phrases 133
　　Notes to the text 133
　　Exercises 134
　6.3 Reading Materials 134
　6.4 Unit Exercises 137
　Appendix Technical Vocabulary 141
　Reference 151